Micro and Nano Fabrication: Tools and Processes - Hans H. Gatzen - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783662508268 - October 6, 2016
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Hans H. Gatzen
Micro and Nano Fabrication: Tools and Processes Softcover reprint of the original 1st ed. 2015 edition

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

545 pages, 303 black & white illustrations, 54 colour illustrations, 25 black & white tables, biogra

Media Books     Paperback Book   (Book with soft cover and glued back)
Released October 6, 2016
ISBN13 9783662508268
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 519
Dimensions 155 × 235 × 28 mm   ·   757 g
Language French  

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