Micro and Nano Fabrication: Tools and Processes - Hans H. Gatzen - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783662443941 - January 20, 2015
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Hans H. Gatzen
Micro and Nano Fabrication: Tools and Processes 2015 edition

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

519 pages, 303 black & white illustrations, 54 colour illustrations, 25 black & white tables, biogra

Media Books     Hardcover Book   (Book with hard spine and cover)
Released January 20, 2015
ISBN13 9783662443941
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 519
Dimensions 164 × 240 × 31 mm   ·   952 g
Language English  

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