System-level Modeling of MEMS - Advanced Micro and Nanosystems - Tamara Bechtold - Books - Wiley-VCH Verlag GmbH - 9783527319039 - February 6, 2013
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Tamara Bechtold
System-level Modeling of MEMS - Advanced Micro and Nanosystems

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System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations.

562 pages, Illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released February 6, 2013
ISBN13 9783527319039
Publishers Wiley-VCH Verlag GmbH
Pages 562
Dimensions 175 × 244 × 32 mm   ·   1.32 kg
Language English  
Editor Brand, Oliver
Editor Fedder, Gary K.
Editor Hierold, Christofer
Editor Korvink, Jan G.
Editor Tabata, Osamu

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