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Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic Compact Models - Microtechnology and MEMS Tamara Bechtold 2007 edition
Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic Compact Models - Microtechnology and MEMS
Tamara Bechtold
This book provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.
180 pages, 9 black & white tables, biography
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | October 6, 2006 |
| ISBN13 | 9783540346128 |
| Publishers | Springer-Verlag Berlin and Heidelberg Gm |
| Pages | 180 |
| Dimensions | 210 × 297 × 12 mm · 444 g |
| Language | English |