Piezoelectric MEMS Resonators - Microsystems and Nanosystems - - Books - Springer International Publishing AG - 9783319804057 - July 12, 2018
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Piezoelectric MEMS Resonators - Microsystems and Nanosystems Softcover reprint of the original 1st ed. 2017 edition

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This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS.

424 pages, 121 Tables, color; 127 Illustrations, color; 104 Illustrations, black and white; XII, 424

Media Books     Paperback Book   (Book with soft cover and glued back)
Released July 12, 2018
ISBN13 9783319804057
Publishers Springer International Publishing AG
Pages 424
Dimensions 150 × 220 × 10 mm   ·   607 g
Language German  
Editor Bhugra, Harmeet
Editor Piazza, Gianluca

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