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Piezoelectric MEMS Resonators - Microsystems and Nanosystems 1st ed. 2017 edition
Piezoelectric MEMS Resonators - Microsystems and Nanosystems
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS.
300 pages, 200 black & white illustrations, biography
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | January 18, 2017 |
| ISBN13 | 9783319286860 |
| Publishers | Springer International Publishing AG |
| Pages | 424 |
| Dimensions | 246 × 166 × 30 mm · 816 g |
| Language | French |
| Editor | Bhugra, Harmeet |
| Editor | Piazza, Gianluca |