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Nanopositioning Technologies: Fundamentals and Applications Softcover reprint of the original 1st ed. 2016 edition
Nanopositioning Technologies: Fundamentals and Applications
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning.
409 pages, 203 Illustrations, color; 76 Illustrations, black and white; VI, 409 p. 279 illus., 203 i
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | March 30, 2018 |
| ISBN13 | 9783319795393 |
| Publishers | Springer International Publishing AG |
| Pages | 409 |
| Dimensions | 150 × 220 × 10 mm · 580 g |
| Language | German |
| Editor | Liu, Xinyu |
| Editor | Ru, Changhai |
| Editor | Sun, Yu |