Nanopositioning Technologies: Fundamentals and Applications -  - Books - Springer International Publishing AG - 9783319795393 - March 30, 2018
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Nanopositioning Technologies: Fundamentals and Applications Softcover reprint of the original 1st ed. 2016 edition

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This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning.


409 pages, 203 Illustrations, color; 76 Illustrations, black and white; VI, 409 p. 279 illus., 203 i

Media Books     Paperback Book   (Book with soft cover and glued back)
Released March 30, 2018
ISBN13 9783319795393
Publishers Springer International Publishing AG
Pages 409
Dimensions 150 × 220 × 10 mm   ·   580 g
Language German  
Editor Liu, Xinyu
Editor Ru, Changhai
Editor Sun, Yu

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