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Nanopositioning Technologies: Fundamentals and Applications 1st ed. 2016 edition
Nanopositioning Technologies: Fundamentals and Applications
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning.
409 pages, 76 black & white illustrations, 203 colour illustrations, biography
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | January 7, 2016 |
| Original release date | 2015 |
| ISBN13 | 9783319238524 |
| Publishers | Springer International Publishing AG |
| Pages | 409 |
| Dimensions | 155 × 235 × 24 mm · 757 g |
| Language | French |
| Editor | Liu, Xinyu |
| Editor | Ru, Changhai |
| Editor | Sun, Yu |