Radio-Frequency Capacitive Discharges - Yuri P. Raizer - Books - Taylor & Francis Inc - 9780849386442 - February 24, 1995
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Yuri P. Raizer
Radio-Frequency Capacitive Discharges 1st edition

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Describes radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. This work provides a treatment of the physics underlying rf discharges, techniques for generating such discharges, experimental methods and measurement techniques, and research results.

304 pages

Media Books     Hardcover Book   (Book with hard spine and cover)
Released February 24, 1995
ISBN13 9780849386442
Publishers Taylor & Francis Inc
Pages 304
Dimensions 237 × 160 × 25 mm   ·   564 g
Language English  

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