Radio-Frequency Capacitive Discharges - Yuri P. Raizer - Books - Taylor & Francis Ltd - 9780367401863 - September 27, 2019
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Yuri P. Raizer
Radio-Frequency Capacitive Discharges 1st edition

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The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings.

Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.

304 pages

Media Books     Paperback Book   (Book with soft cover and glued back)
Released September 27, 2019
ISBN13 9780367401863
Publishers Taylor & Francis Ltd
Pages 304
Dimensions 150 × 220 × 10 mm   ·   460 g
Language English  

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