Kung Linliu

Design a cylinder HDP semiconductor Plasma dry etcher Kung Linliu

A special shape of cylinder metal roller is designed for the truly seamless anti-fake product. And it is manufactured by the traditional lithography and electroforming process. However, it is suffered by the complex manufacturing procedure and complicated chemical parameters then the yield rate is not as expected from the original designing concept. In order to overcome the difficulties of the manufacturing procedures, the novel concept of cylinder shape HDP plasma dry etching of metal roller from semiconductor IC process is proposed and applied to a patent.