Handbook of Advanced Semiconductor Technology and Computer Systems - Van Nostrand Reinhold Electrical / Computer Science and Engineering Series - Guy Rabbat - Books - Springer - 9789401170581 - June 24, 2012
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Guy Rabbat
Handbook of Advanced Semiconductor Technology and Computer Systems - Van Nostrand Reinhold Electrical / Computer Science and Engineering Series Softcover reprint of the original 1st ed. 1988 edition

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Plasma enhanced chemical vapor deposition (PECVD) is a technique widely accepted in microelectronics for the deposition of amorphous dielectric films such as silicon nitride and silicon oxide. Batch etching reactors and etching processes are approaching ma turity after more than ten years of development.

942 pages, 202 black & white illustrations

Media Books     Paperback Book   (Book with soft cover and glued back)
Released June 24, 2012
ISBN13 9789401170581
Publishers Springer
Pages 942
Dimensions 155 × 235 × 48 mm   ·   1.32 kg
Language English  

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