Defects and Properties of Semiconductors: Defect Engineering - Advances in Solid State Technology - J Chikawa - Books - Springer - 9789401086165 - December 25, 2011
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Defects and Properties of Semiconductors: Defect Engineering - Advances in Solid State Technology Softcover reprint of the original 1st ed. 1987 edition

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Defect study in semiconductor engineering started originally with seeking methods how to suppress generation of harmful defects during device processing in order to achieve a high yield of device fabrication.


272 pages, black & white illustrations

Media Books     Paperback Book   (Book with soft cover and glued back)
Released December 25, 2011
ISBN13 9789401086165
Publishers Springer
Pages 300
Dimensions 152 × 229 × 14 mm   ·   367 g
Editor Chikawa, J.
Editor Sumino, K.
Editor Wada, K.

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