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Defects and Properties of Semiconductors: Defect Engineering - Advances in Solid State Technology J Chikawa Softcover reprint of the original 1st ed. 1987 edition
Defects and Properties of Semiconductors: Defect Engineering - Advances in Solid State Technology
J Chikawa
Defect study in semiconductor engineering started originally with seeking methods how to suppress generation of harmful defects during device processing in order to achieve a high yield of device fabrication.
272 pages, black & white illustrations
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | December 25, 2011 |
| ISBN13 | 9789401086165 |
| Publishers | Springer |
| Pages | 300 |
| Dimensions | 152 × 229 × 14 mm · 367 g |
| Editor | Chikawa, J. |
| Editor | Sumino, K. |
| Editor | Wada, K. |