Technologie von MEMS-Elementen auf der Basis nanokristalliner Diamantschichten für eine hybride Integration - Joachim Kusterer - Books - Cuvillier Verlag - 9783869552842 - March 16, 2010
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Joachim Kusterer
Technologie von MEMS-Elementen auf der Basis nanokristalliner Diamantschichten für eine hybride Integration

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Media Books     Paperback Book   (Book with soft cover and glued back)
Released March 16, 2010
ISBN13 9783869552842
Publishers Cuvillier Verlag
Dimensions 144 × 208 × 12 mm   ·   164 g
Language German  

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