Low-Energy Ion Irradiation of Solid Surfaces - Springer Tracts in Modern Physics - Hubert Gnaser - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783662147399 - November 20, 2013
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Hubert Gnaser
Low-Energy Ion Irradiation of Solid Surfaces - Springer Tracts in Modern Physics Softcover reprint of the original 1st ed. 1999 edition

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The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed.

302 pages, 60 black & white illustrations, 9 colour illustrations, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released November 20, 2013
ISBN13 9783662147399
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 294
Dimensions 155 × 235 × 16 mm   ·   426 g
Language German  

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