Primenenie Ionno-luchevogo Travleniya Pri Udalenii Passivatsii Mikroskhem: Ispol'zovanie V Ramkakh Tekhnologii Analiza Otkazov Integral'nykh ... Posloynogo Preparirovaniya - Daniil Abdullaev - Books - LAP LAMBERT Academic Publishing - 9783659207068 - February 26, 2014
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Daniil Abdullaev
Primenenie Ionno-luchevogo Travleniya Pri Udalenii Passivatsii Mikroskhem: Ispol'zovanie V Ramkakh Tekhnologii Analiza Otkazov Integral'nykh ... Posloynogo Preparirovaniya Russian edition

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V dannoy rabote privedyen analiticheskiy obzor otechestvennoy i zarubezhnoy literatury po metodu sukhogo vakuumnogo travleniya materialov, predstavlen obzor primenyaemoy metodiki issledovaniya. V rabote predstavleny rezul'taty optimizatsii protsessov reaktivno-ionnogo plazmennogo i ionno-luchevogo travleniya passivatsionnykh sloyev integral'nykh mikroskhem v ramkakh tekhnologii analiza otkazov. V organizatsionno-ekonomicheskoy chasti predstavleny raschyety stoimosti i tselesoobraznosti dannykh issledovaniy. Rezul'tatom provedyennoy raboty stala novaya metodika udaleniya passivatsionnykh sloyev integral'nykh mikroskhem v ramkakh tekhnologii analiza otkazov, otlichayushchayasya ot sushchestvuyushchikh vysokoy stepen'yu planarizatsii poverkhnosti kristalla integral'noy skhemy pri minimal'nom povrezhdenii mezhsloynogo dielektrika.

Media Books     Paperback Book   (Book with soft cover and glued back)
Released February 26, 2014
ISBN13 9783659207068
Publishers LAP LAMBERT Academic Publishing
Pages 88
Dimensions 150 × 5 × 225 mm   ·   149 g
Language German  

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