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Mikromechanik: Mikrofertigung Mit Methoden Der Halbleitertechnologie Anton Heuberger
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Mikromechanik: Mikrofertigung Mit Methoden Der Halbleitertechnologie
Anton Heuberger
501 pages, black & white illustrations, bibliography
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | June 14, 2012 |
| ISBN13 | 9783642466229 |
| Publishers | Springer-Verlag Berlin and Heidelberg Gm |
| Pages | 501 |
| Dimensions | 170 × 244 × 27 mm · 825 g |
| Language | German |
| Editor | Heuberger, Anton |
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