Low Pressure Plasmas and Microstructuring Technology - Gerhard Franz - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642099397 - October 19, 2010
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Gerhard Franz
Low Pressure Plasmas and Microstructuring Technology Softcover reprint of hardcover 1st ed. 2009 edition

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Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.

732 pages, black & white illustrations

Media Books     Paperback Book   (Book with soft cover and glued back)
Released October 19, 2010
ISBN13 9783642099397
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 732
Dimensions 155 × 235 × 38 mm   ·   1.04 kg
Language English  

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