Reactive Sputter Deposition - Springer Series in Materials Science - - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642095368 - November 25, 2010
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Reactive Sputter Deposition - Springer Series in Materials Science Softcover reprint of hardcover 1st ed. 2008 edition

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In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process.

590 pages, 336 black & white illustrations, 5 colour illustrations, 37 black & white tables

Media Books     Paperback Book   (Book with soft cover and glued back)
Released November 25, 2010
ISBN13 9783642095368
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 572
Dimensions 155 × 235 × 31 mm   ·   885 g
Language German  
Editor Depla, Diederik
Editor Mahieu, Stijn

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