Mechanical Microsensors - Microtechnology and MEMS - M. Elwenspoek - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783642087066 - December 7, 2010
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Mechanical Microsensors - Microtechnology and MEMS Softcover reprint of hardcover 1st ed. 2001 edition

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This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors.


305 pages, 294 black & white illustrations, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released December 7, 2010
ISBN13 9783642087066
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 295
Dimensions 155 × 235 × 16 mm   ·   435 g
Language German  

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