Reactive Sputter Deposition - Springer Series in Materials Science - D Depla - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783540766629 - April 24, 2008
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Reactive Sputter Deposition - Springer Series in Materials Science 2008 edition

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In the family of Physical Vapour Deposition techniques, sputtering is one of the most important. This book describes various aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth allowing the reader to understand the complete process.


590 pages, 336 black & white illustrations, 5 colour illustrations, 37 black & white tables

Media Books     Hardcover Book   (Book with hard spine and cover)
Released April 24, 2008
ISBN13 9783540766629
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 572
Dimensions 162 × 241 × 45 mm   ·   1.13 kg
Language German  
Editor Depla, Diederik
Editor Mahieu, Stijn

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