Handbook of Advanced Plasma Processing Techniques - R J Shul - Books - Springer-Verlag Berlin and Heidelberg Gm - 9783540667728 - August 28, 2000
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R J Shul
Handbook of Advanced Plasma Processing Techniques

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The ability to make small features in Si, metals, dielectrics and other materials has enabled rapid advances in computing and all other technologies that depend on microelectronics, miniature sensors and actuators and magnetic data storage. This work looks at plasma techniques, which enable the fine control and accurate pattern transfer.

655 pages, 141 black & white illustrations, 10 colour illustrations, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released August 28, 2000
ISBN13 9783540667728
Publishers Springer-Verlag Berlin and Heidelberg Gm
Pages 655
Dimensions 166 × 244 × 49 mm   ·   1.05 kg
Language German  
Editor Pearton, S. J.
Editor Shul, R. J.

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