Nanofabrication: Principles, Capabilities and Limits - Zheng Cui - Books - Springer International Publishing AG - 9783319818757 - June 20, 2018
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Nanofabrication: Principles, Capabilities and Limits Second Edition 2017 edition


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This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale.


432 pages, 45 Tables, color; 50 Illustrations, color; 266 Illustrations, black and white; XVII, 432

Media Books     Paperback Book   (Book with soft cover and glued back)
Released June 20, 2018
ISBN13 9783319818757
Publishers Springer International Publishing AG
Pages 432
Dimensions 150 × 220 × 10 mm   ·   625 g
Language German  

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