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Dry Etching Technology for Semiconductors Kazuo Nojiri Softcover reprint of the original 1st ed. 2015 edition
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Dry Etching Technology for Semiconductors
Kazuo Nojiri
129 pages, 123 black & white illustrations, 5 black & white tables, biography
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | September 10, 2016 |
| ISBN13 | 9783319356242 |
| Publishers | Springer International Publishing AG |
| Pages | 116 |
| Dimensions | 155 × 235 × 7 mm · 195 g |
| Language | English |
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