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Design for Manufacturability with Advanced Lithography Bei Yu 1st ed. 2016 edition
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Design for Manufacturability with Advanced Lithography
Bei Yu
This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).
164 pages, 9 black & white illustrations, 91 colour illustrations, 35 black & white tables, biograph
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | November 23, 2015 |
| ISBN13 | 9783319203843 |
| Publishers | Springer International Publishing AG |
| Pages | 164 |
| Dimensions | 155 × 235 × 11 mm · 426 g |
| Language | French |
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