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Chemistry of Atomic Layer Deposition Sean Thomas Barry
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Chemistry of Atomic Layer Deposition
Sean Thomas Barry
This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | November 22, 2021 |
| ISBN13 | 9783110712513 |
| Publishers | De Gruyter |
| Pages | 113 |
| Dimensions | 170 × 240 × 6 mm · 195 g |
| Language | English |
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