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Nanofabrication: Principles, Capabilities and Limits Zheng Cui Third Edition 2024 edition
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Nanofabrication: Principles, Capabilities and Limits
Zheng Cui
The book introduces readers to the fundamentals and recent developments in nanofabrication techniques, with chapters covering optical lithography, electron beam lithography, and nanoimprinting lithography, as well as nanofabrication by focused ion beams, scanning tips, self-assembly, and nanoscale pattern transfer by etching and deposition.
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | July 16, 2025 |
| ISBN13 | 9783031625480 |
| Publishers | Springer International Publishing AG |
| Pages | 413 |
| Dimensions | 155 × 233 × 25 mm · 638 g |
| Language | German |
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