Lithography - Landis - Books - ISTE Ltd and John Wiley & Sons Inc - 9781848212022 - November 19, 2010
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Landis
Lithography

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* Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents * A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.

320 pages, Illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released November 19, 2010
ISBN13 9781848212022
Publishers ISTE Ltd and John Wiley & Sons Inc
Pages 320
Dimensions 240 × 163 × 29 mm   ·   744 g
Language English  
Editor Landis, Stefan (CEA-LETI-Minatec, Grenoble, France)

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