Micro / Nanolithography: A Heuristic Aspect on the Enduring Technology - Jagannathan Thirumalai - Books - IntechOpen - 9781789230307 - May 2, 2018
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Jagannathan Thirumalai
Micro / Nanolithography: A Heuristic Aspect on the Enduring Technology

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The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques.

134 pages

Media Books     Hardcover Book   (Book with hard spine and cover)
Released May 2, 2018
ISBN13 9781789230307
Publishers IntechOpen
Pages 134
Dimensions 251 × 176 × 17 mm   ·   406 g
Language English  
Editor Thirumalai, Jagannathan

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