Substrate Surface Preparation - Max Robertson - Books - Artech House Publishers - 9781608072132 - November 30, 2011
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Max Robertson
Substrate Surface Preparation Unabridged edition

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Covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits, this title offers engineers detailed guidance in the entire substrate surface preparation process, from lapping and polishing... to specialized techniques and surface finishing.

200 pages, illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released November 30, 2011
ISBN13 9781608072132
Publishers Artech House Publishers
Pages 196
Dimensions 157 × 237 × 16 mm   ·   385 g

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