Semiconductor Industry: Wafer Fab Exhaust Management - Sherer, J. Michael (Sherer Consulting Services, Gilbert, Arizona, USA) - Books - Taylor & Francis Inc - 9781574447200 - July 1, 2005
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Sherer, J. Michael (Sherer Consulting Services, Gilbert, Arizona, USA)
Semiconductor Industry: Wafer Fab Exhaust Management 1st edition

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Given the myriad exhaust compounds and the corresponding problems they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, this book offers guidance on selecting an appropriate system for a given application.

216 pages

Media Books     Hardcover Book   (Book with hard spine and cover)
Released July 1, 2005
ISBN13 9781574447200
Publishers Taylor & Francis Inc
Pages 212
Dimensions 243 × 164 × 17 mm   ·   449 g
Language English  

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