Photon Sources for Lithography and Metrology - Press Monographs - Vivek Bakshi - Books - SPIE Press - 9781510653719 - October 31, 2023
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Vivek Bakshi
Photon Sources for Lithography and Metrology - Press Monographs

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Photon sources enable the extension of lithography and metrology technologies forcontinued scaling of circuit elements and therefore are the key drivers for the extension of Moore's law. This volume is the authoritative reference on photon source technology and includes contributions from leading researchers and suppliers in the field.

Media Books     Hardcover Book   (Book with hard spine and cover)
Released October 31, 2023
ISBN13 9781510653719
Publishers SPIE Press
Pages 1320
Dimensions 150 × 220 × 20 mm   ·   1.03 kg
Editor Bakshi, Vivek

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