Extreme Ultraviolet Lithography - Press Monographs - Harry J. Levinson - Books - SPIE Press - 9781510639393 - December 30, 2020
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Harry J. Levinson
Extreme Ultraviolet Lithography - Press Monographs

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Covers the many aspects of lithographic technology that needed to be addressed in order to make EUV lithography ready for high-volume manufacturing: exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Each topic is approached from the perspective of a practicing lithographer.

245 pages

Media Books     Paperback Book   (Book with soft cover and glued back)
Released December 30, 2020
ISBN13 9781510639393
Publishers SPIE Press
Pages 245
Dimensions 252 × 176 × 16 mm   ·   440 g

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