Optical Inspection of Microsystems, Second Edition - - Books - Taylor & Francis Inc - 9781498779470 - June 25, 2019
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Optical Inspection of Microsystems, Second Edition 2nd edition

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This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy and deflectrometry and digital holographic microscropy for the inspection of MEMS.

600 pages, 32 Illustrations, color; 525 Illustrations, black and white

Media Books     Hardcover Book   (Book with hard spine and cover)
Released June 25, 2019
ISBN13 9781498779470
Publishers Taylor & Francis Inc
Pages 570
Dimensions 262 × 188 × 30 mm   ·   1.38 kg
Language English  
Editor Osten, Wolfgang (Universitat Stuttgart, Germany)

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