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An Introduction to Surface-Micromachining Robert W. Johnstone Softcover reprint of the original 1st ed. 2004 edition
An Introduction to Surface-Micromachining
Robert W. Johnstone
Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components.
189 pages, biography
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | December 12, 2012 |
| ISBN13 | 9781475710779 |
| Publishers | Springer-Verlag New York Inc. |
| Pages | 189 |
| Dimensions | 155 × 235 × 11 mm · 290 g |
| Language | English |