Reduced Thermal Processing for ULSI - NATO Science Series B - R a Levy - Books - Springer-Verlag New York Inc. - 9781461278573 - September 30, 2011
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R a Levy
Reduced Thermal Processing for ULSI - NATO Science Series B Softcover reprint of the original 1st ed. 1989 edition

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Proceedings of a NATO ASI held in Boca Raton, Florida, June 20-July 1, 1988

450 pages, black & white illustrations

Media Books     Paperback Book   (Book with soft cover and glued back)
Released September 30, 2011
ISBN13 9781461278573
Publishers Springer-Verlag New York Inc.
Pages 450
Dimensions 170 × 244 × 23 mm   ·   721 g
Language English  
Editor Levy, R.A.

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