Plasma Charging Damage - Kin P. Cheung - Books - Springer London Ltd - 9781447110620 - August 30, 2012
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Kin P. Cheung
Plasma Charging Damage Softcover reprint of the original 1st ed. 2001 edition

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In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.

364 pages, biography

Media Books     Paperback Book   (Book with soft cover and glued back)
Released August 30, 2012
ISBN13 9781447110620
Publishers Springer London Ltd
Pages 346
Dimensions 157 × 234 × 19 mm   ·   522 g
Language English  

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