Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology - Marc J. Madou - Books - Taylor & Francis Inc - 9781420055115 - June 13, 2011
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Marc J. Madou
Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology 1st edition

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Providing a theoretical understanding of MEMS and NEMS, this book covers various aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, it discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal.

656 pages, 745 colour illustrations, 86 black & white tables

Media Books     Hardcover Book   (Book with hard spine and cover)
Released June 13, 2011
ISBN13 9781420055115
Publishers Taylor & Francis Inc
Pages 656
Dimensions 286 × 223 × 31 mm   ·   1.79 kg
Language English  

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