Chemical Vapor Deposition Polymerization: the Growth and Properties of Parylene Thin Films - Fortin, Jeffrey B. (Electronic Materials and Manufacturing Laboratory, Nisakyauna, New York, Usa) - Books - Kluwer Academic Publishers - 9781402076886 - November 30, 2003
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Fortin, Jeffrey B. (Electronic Materials and Manufacturing Laboratory, Nisakyauna, New York, Usa)
Chemical Vapor Deposition Polymerization: the Growth and Properties of Parylene Thin Films 2004 edition

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Provides information on the deposition process and equipment, and on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. This book includes methods to characterize a deposition system's pumping properties and monitor the deposition process via mass spectrometry.

102 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released November 30, 2003
ISBN13 9781402076886
Publishers Kluwer Academic Publishers
Pages 102
Dimensions 156 × 234 × 7 mm   ·   331 g
Language English  

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