Materials and Failures in MEMS and NEMS - A Tiwari - Books - John Wiley & Sons Inc - 9781119083603 - September 28, 2015
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A Tiwari
Materials and Failures in MEMS and NEMS

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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.

432 pages

Media Books     Hardcover Book   (Book with hard spine and cover)
Released September 28, 2015
ISBN13 9781119083603
Publishers John Wiley & Sons Inc
Pages 432
Dimensions 185 × 262 × 28 mm   ·   934 g
Editor Raj, Baldev
Editor Tiwari, Atul

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