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Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 - MRS Proceedings
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Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 - MRS Proceedings
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
334 pages, black & white illustrations
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | June 5, 2014 |
| ISBN13 | 9781107413214 |
| Publishers | Cambridge University Press |
| Pages | 334 |
| Dimensions | 229 × 150 × 21 mm · 490 g |
| Language | English |
| Editor | De Boer, Maarten P. |
| Editor | Heuer, Arthur H. (Case Western Reserve University, Ohio) |
| Editor | Jacobs, S. Joshua |
| Editor | Peeters, Eric |
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