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Microelectromechanical Systems - Materials and Devices IV: Volume 1299 - MRS Proceedings
Microelectromechanical Systems - Materials and Devices IV: Volume 1299 - MRS Proceedings
Symposium S, 'Microelectromechanical Systems - Materials and Devices IV', focused on micro- and nanoelectromechanical systems (MEMS/NEMS).
220 pages, 143 b/w illus. 12 tables
| Media | Books Paperback Book (Book with soft cover and glued back) |
| Released | June 5, 2014 |
| ISBN13 | 9781107406834 |
| Publishers | Cambridge University Press |
| Pages | 220 |
| Dimensions | 152 × 229 × 12 mm · 466 g (Weight (estimated)) |
| Language | English |
| Editor | De Boer, Maarten P. (Carnegie Mellon University, Pennsylvania) |
| Editor | DelRio, Frank W. |
| Editor | Eberl, Christoph |
| Editor | Gusev, Evgeni |