Microelectromechanical Systems - Materials and Devices IV: Volume 1299 - MRS Proceedings -  - Books - Cambridge University Press - 9781107406834 - June 5, 2014
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Microelectromechanical Systems - Materials and Devices IV: Volume 1299 - MRS Proceedings

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Symposium S, 'Microelectromechanical Systems - Materials and Devices IV', focused on micro- and nanoelectromechanical systems (MEMS/NEMS).


220 pages, 143 b/w illus. 12 tables

Media Books     Paperback Book   (Book with soft cover and glued back)
Released June 5, 2014
ISBN13 9781107406834
Publishers Cambridge University Press
Pages 220
Dimensions 152 × 229 × 12 mm   ·   466 g   (Weight (estimated))
Language English  
Editor De Boer, Maarten P. (Carnegie Mellon University, Pennsylvania)
Editor DelRio, Frank W.
Editor Eberl, Christoph
Editor Gusev, Evgeni

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