Micromachining - Lydia Anggraini - Books - - 9781090363268 - March 13, 2019
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Lydia Anggraini
Micromachining

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This book describe how nanoscale resist patterns technology were machined or fabricated on a silicon substrate using a scanning probe microscope (SPM) based on nanolithography (SPNL). The advantage by using this technology is the low cost of nanopatterning device technology can be created, where an atomic force microscope (AFM) is used. Conventional SPNL directly writes nanopatterns using a single probe cantilever.

Media Books     Paperback Book   (Book with soft cover and glued back)
Released March 13, 2019
ISBN13 9781090363268
Pages 82
Dimensions 216 × 279 × 5 mm   ·   285 g
Language English  

See all of Lydia Anggraini ( e.g. Paperback Book )