Plasma Electronics: Applications in Microelectronic Device Fabrication - Makabe, Toshiaki (Keio University, Minato-ku, Tokyo, Japan) - Books - Taylor & Francis Ltd - 9781041192237 - May 13, 2026
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Makabe, Toshiaki (Keio University, Minato-ku, Tokyo, Japan)
Plasma Electronics: Applications in Microelectronic Device Fabrication 3rd edition

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Plasma Electronics: Applications in Microelectronic Device Fabrication, Third Edition, explains the fundamental physics and numerical methods essential for advancing these technologies from laboratory research to manufacturing-scale modeling and design of plasma sources and processes.

Media Books     Hardcover Book   (Book with hard spine and cover)
Released May 13, 2026
ISBN13 9781041192237
Publishers Taylor & Francis Ltd
Pages 389
Dimensions 150 × 220 × 20 mm   ·   950 g

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