Computational Modeling in Semiconductor - M. Meyyappan - Books - Artech House - 9780890067079 - 1995
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Computational Modeling in Semiconductor


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Provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition and plasma processing, as well as defining the basic principles of transport phenomena.


390 pages, 120 illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released 1995
Original release date 1994
ISBN13 9780890067079
Publishers Artech House
Pages 390
Dimensions 159 × 229 × 25 mm   ·   657 g
Editor Meyyappan, M.

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