Nanolithography : the Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems - Woodhead Publishing Series in Electronic and Optical Materials - Martin Feldman - Books - Elsevier Science & Technology - 9780857095008 - December 28, 2013
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Martin Feldman
Nanolithography : the Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems - Woodhead Publishing Series in Electronic and Optical Materials

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Chapters cover lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography, and applications of nanolithography in nanoelectronics, nanophotonics and microfluidics.

592 pages, black & white illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released December 28, 2013
ISBN13 9780857095008
Publishers Elsevier Science & Technology
Pages 592
Dimensions 181 × 243 × 37 mm   ·   997 g
Editor Feldman, Martin

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