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Handbook of Silicon Wafer Cleaning Technology Werner Kern 2nd edition
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Handbook of Silicon Wafer Cleaning Technology
Werner Kern
Intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits, this handbook discusses both wet and plasma-based cleaning technologies that are used for removing contamination, particles, residue, and photoresist from wafer surfaces. It covers both the process and the equipment.
660 pages, Illustrations
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | January 10, 2008 |
| ISBN13 | 9780815515548 |
| Publishers | William Andrew Publishing |
| Pages | 748 |
| Dimensions | 161 × 239 × 41 mm · 1.14 kg |
| Editor | Kern, Werner (Lam Research, San Diego, CA, USA) |
| Editor | Reinhardt, Karen (Cameo Consulting, San Jose, CA, USA) |
