Handbook of Chemical Vapor Deposition: Principles, Technology and Applications - Pierson, Hugh O. (Sandia National Laboratories (retired)) - Books - William Andrew Publishing - 9780815514329 - December 31, 1999
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Pierson, Hugh O. (Sandia National Laboratories (retired))
Handbook of Chemical Vapor Deposition: Principles, Technology and Applications 2nd edition

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Offers an understanding of the advances in the Chemical Vapor Deposition (CVD) process. This book features data on both Plasma CVD and metallo-organic CVD processes. It also explains growing importance of CVD in production of semiconductor and related applications.

506 pages

Media Books     Hardcover Book   (Book with hard spine and cover)
Released December 31, 1999
ISBN13 9780815514329
Publishers William Andrew Publishing
Pages 506
Dimensions 164 × 237 × 40 mm   ·   843 g
Language English  

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