Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators - Microsystems - Gerhard Lammel - Books - Springer - 9780792376552 - January 31, 2002
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Gerhard Lammel
Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators - Microsystems 2002 edition

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Shows how to design and fabricate optical microsystems using technologies and original architectures. This work explains a barcode scanner, laser projection mirror and a microspectrometer, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, and device test to the system assembly.

268 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released January 31, 2002
ISBN13 9780792376552
Publishers Springer
Pages 268
Dimensions 156 × 234 × 17 mm   ·   576 g
Language English  

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