Computational Lithography - Wiley Series in Pure and Applied Optics - Xu Ma - Books - John Wiley & Sons Inc - 9780470596975 - August 6, 2010
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Xu Ma
Computational Lithography - Wiley Series in Pure and Applied Optics

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This is the first book to address the optimization of resolution enhancement techniques in optical lithography. It provides an in-depth discussion of RET tools that use model-based mathematical optimization approaches.

226 pages, Illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released August 6, 2010
ISBN13 9780470596975
Publishers John Wiley & Sons Inc
Pages 256
Dimensions 160 × 241 × 18 mm   ·   508 g
Language English  

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